Gas Name Chemical Formula Specification(%) Impurity (ppm)
Helium He
99.995           TCH4≤1   CO2≤1   Ne≤10 H2≤3   CO≤1   H2O≤10
99.999  O2≤1    TCH4≤1   CO2≤0.5 Ne≤4  H2≤1   CO≤0.5 H2O≤1
99.9995 O2≤0.5  TCH4≤0.1 CO2≤0.2 Ne≤1  H2≤0.1 CO≤0.1 H2O≤1

Argon Ar
99.99   O2≤10 THC≤10  N2≤50 H2≤5  H2O≤15
99.999  O2≤2  THC≤2   N2≤5  H2≤1  H2O≤4
99.9995 O2≤1  THC≤0.5 N2≤2  H2≤0.5 H2O≤1

Hydrogen H2
99.99  O2≤5 CO2≤5 N2≤60 TCH4≤10 CO≤5  H2O≤5
99.999 O2≤1 CO2≤1 N2≤5  TCH4≤1   CO≤3 H2O≤1

Nitrogen N2
99.99  O2≤50 CO2≤10 N2≤10 CO≤5 H2O≤15 CH4≤30
99.999 O2≤1  H2O≤2  H2≤1  THC≤3

Oxygen O2 99.995 Ar≤20 CO2≤1 N2≤20 THC≤2
Carbon Dioxide CO2
99.995 O2≤10 H2O≤5 N2≤20 CO≤1 THC≤10
99.999 O2≤1 H2O≤2  N2≤5  CO≤1 THC≤1

Carbon Monoxide CO 99.95 N2<350, O2<50, H2O<5
Sulfur Dioxide SO2 99.97 O2+N2<100, H2O<10, <200
Nitrogen Monoxide NO 99.5 N2O<4000\NO2<2000\N2<300\CO2<500
Nitrogen Dioxide NO2 99.9
Nitrous Oxide N2O 99.99

Neon Ne
99.995 H2≤2 N2≤5 He≤40 THC≤1 O2+Ar≤2 H2O≤2
99.999 O2≤1 N2≤5 H2O≤2 He≤10

Krypton Kr
99.99  N2≤20 H2≤2   O2+Ar≤5 Xe≤50 H2O≤3   THC≤3
99.999 N2≤3  H2≤0.5 O2+Ar≤2 Xe≤4  H2O≤2.6 THC≤1

Xenon Xe
99.99  N2≤20 Ar≤10 N2O≤1  O2≤2     H2≤2    Kr≤50  H2O≤3 THC≤3
99.999 N2≤3  THC≤1 N2O≤0.5 O2+Ar≤2 H2O≤2.6 H2≤0.5 Kr≤4

Sulfureted Hydrogen H2S 99.9 H2<200ppm\O2+N2<100ppm\H2O<3ppm
Hydrogen Chloride HCl 99.9%
Hydrogen Chloride HCl 99.99%
Hydrogen Chloride HCl 99.999% N2≤4, CO2≤5, H2O≤1, O2+Ar≤1, TCH≤1
Liquid Chlorine Cl2 99.9 CO2<400\CO10\H2<200, N2<100\O2<20\H2O<100
99.999
Ammonia NH3 99
99.999 O2<1.0ppm\N2<2.0ppm\CO1.0ppmH2O<2.0ppm
THC(C1~C3)<1.0ppm
Sulfur hexafluoride SF6 99.99 O2≤10 H2O≤5 N240 HF≤0.1 CF4≤25
Synthetic Air Air O2: 19.5-22.5 H2O≤5 CO/CO2≤0.5 THC≤5
Zero Air O2: 19.5-22.5 H2O≤5 CO/CO2≤0.5 THC≤0.1

Organic Gas Product
Gas Name Chemical Formula Specification (%) Impurity(ppm)
Methane CH4
99.5 O2≤100 HC≤1500 N2≤600 H2≤2000
99.95   O2≤5   H2≤10  N2≤100 HC≤100 H2O≤5 CO/CO2≤10
99.995  O2≤2   H2≤5   N2≤10  HC≤20  H2O≤5 CO/CO2≤1
99.9995 O2≤0.5 H2≤0.1 N2≤2   HC≤0.1 H2O≤2 CO2≤0.1

Ethane C2H6
99.9  O2≤50 N2≤40  HC≤1000
99.99 O2≤2  HC≤100 N2≤5H2O≤5 CO2≤5
Ethene C2H4
99.95  O2≤2 CH4≤100 N2≤5 C2H6≤350 H2O≤30 HC≤100
Propane C3H8
98.5 O2≤100 HC≤14000 CO+CO2≤10 H2O≤12
99.95 O2≤10 HC≤400   N2≤40     H2O≤5 CO2≤10

Propylene C3H6
99.5  HC≤1000 C3H8≤4000
99.95 N2≤10   C3H8≤3000 C4H6-1.3≤5 CH4≤5 C4H10≤5 C6H6≤5
Allene C3H4 98 Propargyl≤20000
Propargyl C3H4 98 Allene≤20000
Cyclopropane Cy-C3H6 99.0
N-butane n-C4H10
99.0  O2≤15 H2O≤20 HC≤1%
99.5  O2≤15 H2O≤12 HC≤5000 CO2+CO2≤10
99.95 O2≤10 H2O≤10 HC≤500  CO2+CO2≤10

Isobutane I-C4H1099.5 O2≤15 C3H8≤4000C4(uns. )≤100 H2O≤15
N-C4H10≤2500 CO+CO2≤10
99.99 O2≤10 C3H8≤10 C4(uns. )≤50 H2O≤ 5 n-C4H10≤50 CO+CO2≤10

Butylene-1 1-C4H8 99.9 H2O≤10 HC≤1000
Positive-2-butylene C-2-C4H8 99.4 HC≤7000
Anti-2-butylene t-2-C4H8 99.4 HC≤7500
Isobutylene I-C4H8 99.99 H2O≤5 HC≤100
1.3-butadiene 1, 3-C4H6 99.8 O2≤5 N2≤10 HC≤1200
N-pentane n-C5H12 99.5 C5H100.1wt%I-C5H120.4wt%
Isopentane I-C5H12 99.3 n-C5H12wt0.5%
Chloromethane CH3Cl 99 CH3OH<4000
Methyl Bromide CH3Br 99.99 O2≤1, H2O≤2
Chloroethylene C2H3Cl 99.9.